Microsystem Technology and Microrobotics

by Sergej Fatikow, Ulrich Rembold

Overview

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Product Details

ISBN-13:	9783540606581
Publisher:	Springer Berlin Heidelberg
Publication date:	02/12/2002
Series:	Microsystem Technology and Microrobotics Series
Edition description:	1997
Pages:	408
Product dimensions:	6.14(w) x 9.21(h) x 0.36(d)

Table of Contents

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.