Resonant Network Antennas for Radio-Frequency Plasma Sources: Theory, technology and applications

Resonant antennas are increasingly employed by the plasma industry, and the theory has now developed alongside the technological applications to the extent that it is timely to document the progress in this field to aid antenna design for future novel RF plasma sources. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma. It describes industrial applications, and covers state-of-the-art research i...