Secondary Ion Mass Spectrometry and Its Application to Materials Science (Second Edition)

In this edition of Secondary Ion Mass Spectrometry (SIMS) and its Application to Material Science the authors expand further on the principles and methods presented in the first edition. A more detailed overview of the principles of SIMS is given, and of how the development of dual-beam instruments has blurred the traditional fields of dynamic and static SIMS to enable greater analytical possibilities. In particular the development and application of cluster ion beams, and how this has open...