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Secondary Ion Mass Spectrometry: Fundamentals, Advancements and Applications
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Secondary ion mass spectrometry (SIMS) is a technique used to analyse the composition of solid surfaces and thin films by sputtering the surface of the specimen with a primary ion beam and collecting and analysing ejected secondary ions. The technique has been applied to quality assurance in semiconductor manufacture, in forensics for enhancement of fingerprints and to determine the composition of cometary dust.
This book briefly introduces the fundamentals of the SIMS technique and discuss...