Order History
Premium Membership & Rewards
Help Center / FAQ
SIMOX
Hardcover
$165.00
By Katsutoshi Izumi, Maria J. Anc (Editor), Peter L.F. Hemment, Atsushi Ogura, Harold J. Hovel, Devendra K. Sadana
Premium Members save an extra 10% and all Members collect stamps to save with Rewards. 10 stamps = $5.Learn More
Select a store to view item availability.
SIMOX explores Separation-by-IMplanted-OXygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing.
The content includes an historical perspective on the development of SIMOX technology and a discussion of the theoretical background to the underlying formation of SIMOX buried oxide. It also describes the fabrication processes and material characterisation, and covers crucial advancements in evolu...