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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

By Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
eBook
$54.99
By Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
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This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatur...

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