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Trace Analysis of Specialty and Electronic Gases

By William M. Geiger (Editor), Mark W. Raynor (Editor)
eBook
$99.00
By William M. Geiger (Editor), Mark W. Raynor (Editor)
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Explores the latest advances and applications of specialty and electronic gas analysis

The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the ...

Categories

Science & TechnologyChemistryAnalytical ChemistryAnalytical Chemistry - General & Miscellaneous