Vibrations of Elastic Systems: With Applications to MEMS and NEMS

This work presents a unified approach to the vibrations of elastic systems as applied to MEMS devices, mechanical components, and civil structures.

Applications include atomic force microscopes, energy harvesters, and carbon nanotubes and consider such complicating effects as squeeze film damping, viscous fluid loading, in-plane forces, and proof mass interactions with their elastic supports. These effects are analyzed as single degree-of-freedom models and as more realistic elastic structu...