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This book highlights the latest advances in bioMEMS for biosensing applications. It comprehensively reviews different detection methods, including colorimetric, fluorescence, luminescence, bioluminescence, chemiluminescence, biochemiluminescence, and electrochemiluminescence, and presents various bioMEMS for each, together with recent examples. The book also offers an overview of the history of BioMEMS and the design and manufacture of the first bioMEMS-based devices.