Cleanrooms: Facilities and Practices

In writing this book, our goal was to produce a much needed teaching and reference text with a fresh approach to c1eanroom technology. The most obvious technological reason for bringing this book into being is that c1ean­ rooms have become vital to the manufacture and development of high­ technology products in both the commercial and military sectors, and there­ fore people have to develop an understanding of them. Examples of c1ean­ room applications include the manufacture of integrated ...