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Emerging Technologies for In Situ Processing

By D.J. Ehrlich (Editor), Van Tran Nguyen (Editor)
Paperback
$54.99
By D.J. Ehrlich (Editor), Van Tran Nguyen (Editor)
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1. H. Ahmed In-Situ Processing Canbining MBE, Lit: hJgraphy and Ion-Implantation 2. 1. Hayashi M:: >tivations and Early DenDnstrations for In-Situ Prcx:: essings For III -V Semiconductor Devices 13 3. John J. Ritsko Laser Etchi. nJ and Microelectronic Applications 23 4. D. Bauerle, T. Szorenyi, G. Q. Zhang, K. Piglmayer, M. Eyett, R. Kullmer Laser-Induced O1emical Processing of Materials 33 5. E. L. Hu High Technology Manufacturing: Critical Issues for the Future 45 6. J. P. Harbison, P. F....

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Science & TechnologyEngineeringElectrical & Electronic EngineeringElectronics - Circuits - VLSI