Introduction To Microelectromechanical(Mem)Microwave Systems

Microelectromechanical systems (MEMS) applications in RF and microwave electronics are on the verge of revolutionizing wireless communications. Now you can sharpen your understanding of this emerging field with this comprehensive new book that explains the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book's unique presentation integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave c...