Introduction to Microelectromechanical Systems Engineering

by Nadim Maluf, Kirt Williams

Overview

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list.

Product Details

ISBN-13:	9781580535908
Publisher:	Artech House, Incorporated
Publication date:	07/01/2004
Series:	Microelectromechanical Systems Series
Edition description:	New Edition
Pages:	304
Product dimensions:	7.00(w) x 10.00(h) x 0.69(d)

About the Author

Nadim Maluf is vice president of New Focus, Inc. and a consulting professor of electrical engineering at Stanford University. Prior to joining New Focus, he was head of research and development at NovaSenor. A best-selling author in the area of MEMS technology, Dr. Maluf earned his Ph.D. in electrical engineering at Stanford University and his M.S. in electrical engineering at the California Institute of Technology. Kirt Williams is a MEMS consultant based in California's Silicon Valley. Formerly, he was a member of the technical staff at Agilent Technologies. He received his Ph.D. and M.S. in electrical engineering from the University of California at Berkeley. He is the author of numerous papers on MEM devices and fabrication processes.

Table of Contents

MEMS: A Technology from Lilliput. The Sandbox: Materials for MEMS. The Toolbox: Processes for Micromachining. MEM Structure and Systems in Industrial and Automotive Applications. Optical MEM Structures and Systems. MEM Structures and Systems for Medical Applications. MEM Structures and Systems for Electronic Applications. Packaging & Reliability for MEMS. Glossary.

Editorial Reviews

Maluf (electrical engineering, Stanford U.) describes the materials used in the tiny highbryd systems, such as silicon, polymers, and glass and quartz substrates and the design and fabrication of nozzles, pressure and inertial sensors, valves, displays, and other applications. He examines the manufacture of commercial systems using surface and bulk micromachining techniques, among them oxidation, lithography, chemical vapor deposition, silicon fusion bonding, and anisotropic wet and dry etching. His treatment is a reference for engineers and students. Annotation c. Book News, Inc., Portland, OR (booknews.com)

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