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Low Dielectric Constant Materials for IC Applications

By Paul S. Ho (Editor), Jihperng Leu (Editor), Wei William Lee (Editor)
Hardcover
$169.99
By Paul S. Ho (Editor), Jihperng Leu (Editor), Wei William Lee (Editor)
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Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.

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