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Low Dielectric Constant Materials for IC Applications

By Paul S. Ho (Editor), Jihperng Leu (Editor), Wei William Lee (Editor)
Hardcover
$169.99
By Paul S. Ho (Editor), Jihperng Leu (Editor), Wei William Lee (Editor)
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Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applications in microelectronics. Highly informative contributions from leading academic and industrial laboratories provide comprehensive information about materials technologies for

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