Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit: From Mega-Bit to Giga-Bit

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.