MEMS and MOEMS Technology and Applications
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.
1101664096
MEMS and MOEMS Technology and Applications
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.
102.0
In Stock
5
1
MEMS and MOEMS Technology and Applications
528
MEMS and MOEMS Technology and Applications
528Hardcover(New Edition)
$102.00
102.0
In Stock
Product Details
| ISBN-13: | 9780819437167 |
|---|---|
| Publisher: | SPIE Press |
| Publication date: | 12/06/2000 |
| Series: | Monographs Series |
| Edition description: | New Edition |
| Pages: | 528 |
| Product dimensions: | 7.30(w) x 10.30(h) x 1.30(d) |
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