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MEMS and MOEMS Technology and Applications

By Prosenjit Rai-Choudhury (Editor)
Hardcover
$51.00
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By Prosenjit Rai-Choudhury (Editor)
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Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.

Categories

Science & TechnologyEngineeringElectrical & Electronic EngineeringMechanical Engineering & DynamicsElectronics - MicroelectronicsElectronics - OptoelectronicsMechanical Engineering - General & Miscellaneous