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Microelectromechanical Systems: Concepts, Design and Analysis

By Barkley Sparks (Editor)
Hardcover
$157.00
By Barkley Sparks (Editor)
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Microelectromechanical systems (MEMS) refer to the technology of microscopic devices that consists of moving parts. It is made up of components, whose size ranges between 1 and 100 micrometers. It ideally consists of a microprocessor and different micro sensors. MEMS can be designed using modified semiconductor device fabrication technologies. Wet etching, dry etching, molding and plating, electro discharge machining are examples of such technologies. Ceramics, metals, silicon and polymers ...

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