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Microelectromechanical Systems: Volume 1139: Materials and Devices II

By Srikar Vengallatore (Editor), Jörg Bagdahn (Editor), Norman F. Sheppard, Jr (Editor), S. Mark Spearing (Editor)
Hardcover
$141.00
By Srikar Vengallatore (Editor), Jörg Bagdahn (Editor), Norman F. Sheppard, Jr (Editor), S. Mark Spearing (Editor)
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Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifun...

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