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Microlithography: Science and Technology

By Bruce W. Smith (Editor), Kazuaki Suzuki (Editor)
Hardcover
$235.00
By Bruce W. Smith (Editor), Kazuaki Suzuki (Editor)
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The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s lead...

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Science & TechnologyTechnologyEngineeringTechnology - General & MiscellaneousEngineering TechnologyNanotechnologyOptics - Lasers & Holography