Micromachined Circuits and Devices: Microwave to Sub-millimeter Applications

This book presents the design of different switching and resonant devices using the present state—of—the—art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single—pole—double—throw (SPDT) to single—pole—fourteen—throw (SP14T) are discussed utilizing vertical and lateral actuation...