Microstereolithography and other Fabrication Techniques for 3D MEMS

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS.

This volume discusses the fundamental principles of microstereolithography for fabrication of 3D...