Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.

The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fab...