Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines

by Jeffrey Lang (Editor)

Paperback(2010)

$269.00
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Product Details

ISBN-13: 9781461424598
Publisher: Springer US
Publication date: 03/03/2012
Series: MEMS Reference Shelf
Edition description: 2010
Pages: 456
Product dimensions: 6.10(w) x 9.25(h) x 0.04(d)

Table of Contents

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.

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