Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration

Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration

by Rïdiger G. Ballas

Paperback(2007)

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Product Details

ISBN-13: 9783642069109
Publisher: Springer Berlin Heidelberg
Publication date: 11/19/2010
Series: Microtechnology and MEMS
Edition description: 2007
Pages: 358
Product dimensions: 6.10(w) x 9.25(h) x 0.36(d)

About the Author

Rüdiger G. Ballas was born in 1971 in Blieskastel, Germany. After finishing education as an assistant in physics at the Technical School for Natural Sciences Ludwigshafen, Germany, he received the diploma in microsystemtechnology in 1999 from the University of Applied Sciences Kaiserslautern, Germany. From 1999 until 2001 he worked with Tele Quarz in Neckarbischofsheim, Germany, where he was head of the group concerning microstructuring of AT-quartz crystals and development of high-frequency inverted MESA-quartzes. From 2001 until 2006 he worked as a Ph.D. student at Darmstadt University of Technology in the field of piezoelectric bending multilayer actuators with integrated sensors for tip deflection measurements. He received the Ph.D. degree in electrical engineering in 2006 from Darmstadt University of Technology. His actual research fields are theoretical mechanics, electromechanical system theory and modeling of the nonlinear behavior of piezoelectric actuators.

Table of Contents

Focus of the Book.- Theoretical Aspects and Closed Form Analysis.- Piezoelectric Materials.- Linear Theory of Piezoelectric Materials.- Theory of the Static Behavior of Piezoelectric Beam Bending Actuators.- Piezoelectric Beam Bending Actuators and Hamilton’s Principle.- Theory of the Dynamic Behavior of Piezoelectric Beam Bending Actuators.- Network Representation of Piezoelectric Multilayered Bending Actuators.- Measurement Setup and Validation of Theoretical Aspects.- Measurement Setup for Piezoelectric Beam Bending Actuators.- Measurements and Analytical Calculations.- Sensor Integration for Tip Deflection Measurements.- Piezoelectric Beam Bending Actuator with Integrated Sensor.- Tip Deflection Measurement — Capacitive Sensor Principle.- Tip Deflection Measurement — Inductive Sensor Principle.- Conclusion.

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