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Post-Processing Techniques for Integrated MEMS

By Sherif Sedky
Hardcover
$54.50
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By Sherif Sedky
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This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won't modify the electronics fabrication process or impose any limitation for optimizing the physical...

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Science & TechnologyEngineeringElectrical & Electronic EngineeringMechanical Engineering & DynamicsElectronics - MicroelectronicsMechanical Engineering - General & Miscellaneous