Rapid Thermal Processing of Semiconductors / Edition 1

Rapid Thermal Processing of Semiconductors / Edition 1

ISBN-10:
0306450542
ISBN-13:
9780306450549
Pub. Date:
05/31/1997
Publisher:
Springer US

Hardcover

Current price is , Original price is $249.99. You
Select a Purchase Option (1997)
  • purchase options
    $168.51 $249.99 Save 33% Current price is $168.51, Original price is $249.99. You Save 33%.
  • purchase options

Overview

Rapid Thermal Processing of Semiconductors / Edition 1

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Product Details

ISBN-13: 9780306450549
Publisher: Springer US
Publication date: 05/31/1997
Series: Microdevices
Edition description: 1997
Pages: 358
Product dimensions: 7.01(w) x 10.00(h) x 0.03(d)

Table of Contents

Transient Heating of Semiconductors by Radiation. Recrystallization of Implanted Layers and Impurity Behavior in Silicon Crystals. Crystallization, Impurity Diffusion and Segregation in Polycrystalline Silicon. Component Evaporation, Defect Annealing and Impurity Diffusion in the III-V Semicondutors. Diffusion Synthesis of Silicides in Thin Film Metal-Silicon Structures. Rapid Thermal Oxidation and Nitridation. Rapid Thermal Chemical Vapor Deposition. Indexes.

Customer Reviews

Most Helpful Customer Reviews

See All Customer Reviews