Sensor Technology in the Netherlands: State of the Art: Proceedings of the Dutch Sensor Conference held at the University of Twente, The Netherlands, 2-3 March 1998

In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electr...