Silicon Technologies: Ion Implantation and Thermal Treatment

This book has been written to provide newly arrived engineers in a silicon foundry environment with a comprehensive background in the fundamental physical and chemical basis for major front-end silicon treatments, such as oxidation, epitaxy, ion implantation and impurities diffusion, as well as giving a survey of the major types of equipment used in integrated circuit (IC) chip foundries.

Techniques include various forms of chemical vapor deposition (CVD), epitaxy, thin film technologies, l...