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Surfaces, Interfaces, and Films for Microelectronics

By Eugene A. Irene
Hardcover
$216.95
By Eugene A. Irene
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The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industr...

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